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Jon Goldman Associates Offers Line of Diffusion
Furnace Controllers and Control Software
Contact: Andrea Roberts, A·R Marketing
858-451-8666; aroberts@san.rr.com
Orange, CA - December, 2002 - Jon Goldman
Associates, Inc. (JGA), manufacturer of data capture, analysis,
and process control software for diffusion furnaces and other
semiconductor equipment, announces the availability of the
ICCI SLC99 Furnace Controller and Windows®-based GMI (Graphical
Management Interface) Host. The SLC99 is used on new furnaces
or as replacement for old and obsolete controllers on existing
furnaces. The GMI Host is a "station controller" for editing
recipes, collecting and analyzing data, obtaining status information,
and managing equipment operation.
The Windows-based GMI Host software adds functionality
and versatility to the SLC99 controller. It consists of two
main modules, the Supervisor Module and the Engineer Module.
The Supervisor Module provides low-level serial communication
with the SLC99 Controller and can communicate with up to eight
furnace controllers on a single PC platform. The Engineer
Module provides important user functions: Tube Status, Recipe
Edit and Download, Run Start, Alarm Viewing and Acknowledge,
Trace Data Viewing, etc. Since the Supervisor and Engineer
Modules are software, they can be placed together on the same
PC, giving users local access to all controller and user functions.
The Engineer Module can also run on any networked PC for remote
access as well as on an Internet Server, providing worldwide
remote access to all controller and user functions.
The GMI Host infrastructure allows five access
group levels. The Engineer Module includes process status
and event log, viewer recipe manager, recipe editor, trace
data viewer utilities, and maintenance manager. A Statistical
Process Control Module can also be provided.
The SLC99 furnace controller consists of a
chassis (the heart of the controller), temperature electronics
module, input/output boards, a boat-loader interface, and
operator terminal. There are several options to address different
process needs. For example, different Gas Electronics Boards
are available for either CVD or Atmospheric applications.
These boards provide gas and pressure safety interlocks and
gives the controller the capability to perform leak checking,
low gas flow detection, hydrogen/oxygen ratios, etc. An LED
board is another option.
The SLC99 offers great functionality. It can
handle recipes of up to 99 steps. Each recipe step controls
3-zone or 5-zone temperature settings with either spike or
profile thermocouple control, eight analog (MFC) loops, and
can redirect based on numerous step-exit conditions. The controller
can also drive digital output signals for various indicators
such as lights and horns as well as valves.
"Having both the software and the controllers
allow us to provide our customers with all the parts necessary
to monitor, control, and maintain a diffusion furnace," commented
Jon Goldman Associates Vice President and COO Kerry Eszlinger.
"We can handle any type of furnace and provide replacement
parts, upgrades, or an entirely new system."
Jon Goldman Associates, based in Orange, CA,
is in its twelfth year of providing data mining software solutions
to the semiconductor industry. JGA's data analysis tools are
widely used in the industry by both end users and equipment
manufacturers to reduce downtime and wafer scrap by implementing
and improving SPC control. JGA's recently acquired Integrated
Control Concepts, Inc. (ICCI) Division, based in Hollis, NH,
manufactures diffusion and LPCVD process controllers and software
used throughout the semiconductor industry. Visit the JGA
website at www.JGA-inc.com.
Jon Goldman Associates
Kerry Eszlinger
2237 N. Batavia Street
Orange, CA 92865
Phone: (714) 283-5889
Fax: (714) 283-2884
Kerry@JGA-Inc.com
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A·R Marketing, Inc.
Andrea Roberts
PO Box 501528
San Diego, CA 92150
Phone: (858) 451-8666
Fax: (858) 451-8777
aroberts@san.rr.com
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Jon Goldman Associates, based in Orange, CA, has been
providing data mining software solutions to the semiconductor
industry for over ten years. Founder and President Dr. Jon
Goldman has been serving the semiconductor industry for more
than 25 years. He is the holder of several patents, including
LPCVD deposition of Silicon Nitride, LTO, and BPSG. JGA's
data analysis tools are widely used in the industry by both
end users and equipment manufacturers to reduce down time
and wafer scrap by implementing and improving SPC control.
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