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When the temperature in one furnace tube affects the tenperature in an an adjacent tube... |
| Data Mining Systems for the Semiconductor Industry
The GMI Engineer main form is termed Cell Manager. The Cell Manager depicts each furnace stack (up to eight tubes) as a large rectangle with the bank name and number as a header. The 'stacks' are sized automatically depending on the number of stacks in the system. Thus, all the stacks in the fab can be viewed on a single form. Within each stack a circle represents one tube. Each circle shows the name of the tube; its color reflects the status of that tube at any given time. For example, if the circle is gray, the tube is off-line. If the circle is white, the tube is active and on-line. Other colors such as yellow, green and red indicated states of alarms or alerts. Thus, at a glance from anywhere in the fab, in the office or around the world, interested personnel can determine the status of any tube in any bank. Clicking anywhere within a 'stack' (rectangle) brings that bank into focus. Clicking within a circle brings up a Tube Detail page showing all the current parameters and setpoints for that tube and the current recipe. Overview | Features & Benefits | Cell Manager | Process Manager | Graphical Process Analyzer | Recipe Manager | Maintenance Manager | Event Viewer | Security Manager
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