Data Mining Systems for the Semiconductor Industry

PRODUCTS
GMI Host - Features & Benefits

Features:

• Control up to eight SLC95/SLC99 controllers from each supervisor computer
• Display detailed real-time status for each tube
• Store and edit up to 3000 engineering, production, and maintenance recipes
• Fully control tube configuration and recipe downloading
• Search and browse complete logs of all system and user events
• Capture, graph, and compare real-time data, archived data, and recipes
• Control user access through multiple security levels
• Remotely control supervisors and back up recipes over the network

Benefits:

• Quickly train engineers, operators, and technicians
  
  The new Graphical Management Interface, running under Windows NT, significantly reduces the learning curve for everyone who uses the system.
  
  
• Integrate seamlessly with your existing data network
  
  The software runs on ordinary PCs and uses standard Ethernet wiring and communications protocols.
  
  
• Instantly see the effect of changes as you edit a recipe
  
  As you edit a recipe in a simple spreadsheet format, the new Recipe Editor displays the recipe in graphical form at the same time, so you can see the effects of your edits.
  
  
• Manage recipes safely and in the way that works best for you
  
  The new Recipe Manager tracks all recipe revisions. It lets you number recipes separately for each supervisor or globally to minimize the risk of downloading the wrong recipe.
  
  
• Quickly check the status of all tubes from a single screen
  
  The GMI Cell Manger color-codes each tube's status so you can see at a glance which ones are offline, idle, profiling, running, and needing attention.
  
  
• Anticipate your next operational task and use your time efficiently
  
  The new customer-designed Time Remaining window lists all active tubes and highlights the one that will finish next, so you can plan how to make the most of your time and equipment.
  
  
• Get all the real-time information you need about in-process recipes
  
  The Process Manager screen displays current temperatures, gas flows, valve states, recipe step number, and more on one screen for easy monitoring and control.
  
  
• Quickly respond to changing conditions
  
  You can acknowledge alarms and download, start, and abort recipes while viewing current process status on the Process Manager screen.
  
  
• Find out what happened and when
  
  The comprehensive Event Viewer lets you search any dates and times for system and operator events, sort what you find, and print all or selected parts of the displayed results.
  
  
• Automatically capture process data, and graph or analyze it now or later
  
  The Graphical Process Analyzer plots live or archived process data with up to 14 parameters per graph, and lets you view multiple graphs simultaneously. On a single graph you can plot two runs of the same recipe, or a single run and its recipe parameters. And you can import captured data into other PC applications for reporting and analysis.   

Overview | Features & Benefits | Cell Manager | Process Manager | Graphical Process Analyzer | Recipe Manager | Maintenance Manager | Event Viewer | Security Manager