Data Mining Systems for the Semiconductor Industry

PRODUCTS
GMI Host - Graphical Process Analyzer

  Data Capture and Viewing

Graphical Process Analyzer - Click to Enlarge

Clicking on the Graphical Process Analyzer icon from either the Cell Manager form or the Process Status form raises the Graphical Process Analyzer. A series of selection criteria forms allow the user to select the date and file for the desired data capture. Once the desired file is located a template form is activated that permits the user to select data capture parameters to be displayed graphically. The Data Capture form is divided into two sections (top and bottom) allowing two different vertical axis scales to be displayed simultaneously. For example, the top half of the form can display temperature parameters while the bottom half can display MFC gas flows. The horizontal scale can display data as a function of time or step number. In addition, two data capture files can be displayed simultaneously for easy comparison.

Overview | Features & Benefits | Cell Manager | Process Manager | Graphical Process Analyzer | Recipe Manager | Maintenance Manager | Event Viewer | Security Manager