Data Mining Systems for the Semiconductor Industry

PRODUCTS
GMI Host - Overview

The GMI Host consists of two main modules: The Supervisor Module and the Engineer Module. The Supervisor Module takes care of all low-level serial communication with the SLC99 Controller. The Engineer Module provides all the important User functions: Tube Status, Recipe Download, Edit, Run Start, View Trace Data, etc.

GMI Supervisor Low-level communication with Tube Controllers, etc.

GMI Engineer High-level communication with people.

Bruce Controllers SLC-99 Controllers

One GMI Supervisor controlling two stacks - Click to Enlarge

One GMI Host Supervisor Module can provide low-level communication with up to eight ICCI Furnace Controllers arranged in two stacks.

GMI Engineer running on a local Supervisor, over the network, and over the internet - Click to Enlarge

The Engineer Module can run on the same local PC along with the Supervisor giving users local access to all Controller functions.

The Engineer Module can also run on any networked PC, giving users remote access to all Controller functions.

Finally, the Engineer Module can run on an Internet Server giving users worldwide remote access to all Controller functions.

Overview of a system with multiple furnace stacks - Click to Enlarge

Here is an overview of a system with multiple furnace stacks, showing the positions of local GMI Host Supervisors in the fab near the equipment, and remote Engineers outside the fab. Engineer Modules can access all tubes from any stack. This is true for Engineer Modules running on local PCs along with Supervisor Modules and for Engineer Modules running alone on remote PCs.

Overview | Features & Benefits | Cell Manager | Process Manager | Graphical Process Analyzer | Recipe Manager | Maintenance Manager | Event Viewer | Security Manager