Data Mining Systems for the Semiconductor Industry

PRODUCTS
GMI Host - Process Manager

Detailed Process Status and Furnace Control

Process Manager - Click to Enlarge

The Process Status form is accessed by double-clicking within the desired tube's circle on the Cell Manager. It is divided into five areas: Tube Status, Gases, Temperatures, Boatloader and Digital.

Tube status shows the number and name of the supervisor, current recipe, step, and step/ recipe time remaining. There is a short message, such as "Waiting for the Start Switch" or "Profiling."

The gases area shows the name of each gas, its range and units and its current setpoint and flow. A bar graph shows the deviation of the actual flow from its setpoint value (in percent). Main and auxiliary valve states are also shown.

The Temperature area shows the name of each temperature zone, range, units and current setpoint and value. A bar graph shows deviation from setpoint in degrees. Other information such as the name of the profile thermocouple, control mode and temperature alarm factor are also shown.

The Boatloader area shows the boat status, limit, current speed and current position.

The Digital area shows the status of all digital inputs and digital outputs.

Recipes may be Downloaded, Started and Aborted from this form. New tube configurations can be downloaded. Alarms are indicated on this form in several colors depending on the severity (alert or alarm). A quick glance can tell the operator the status of any alarm. Alarm acknowledgement is also accomplished on this form.

Overview | Features & Benefits | Cell Manager | Process Manager | Graphical Process Analyzer | Recipe Manager | Maintenance Manager | Event Viewer | Security Manager