Data Mining Systems for the Semiconductor Industry

PRODUCTS
SLC-99 Controllers

ICCI Controllers can replace obsolete controllers on the following types of equipment…

• Diffusion Furnaces (Bruce, TEL, Thermco, Tempress, Tystar, etc.)
• Gasonics Hypox Systems
• ASM andPacific Western Plasma CVD Systems
  

Controller Functionality:

• 1 to 99 Steps per recipe. Each can change:
  • 16 Valves on/off
  • 8 MFC’s to one of 4 setpoints.
  • 3 or 5 temperature zones to 1 of 8 setpoints.
  • Temperature control mode either Spike or Profile
• Allowable Exit Conditions for Each Step:
  • On time and/or one of the following.
  • On 12 programmable digital inputs.
  • On Analog Input.
  • On leak rate.
  • On Profile completed.
  • On BOAT-IN BOAT-OUT complete.
• 3 or 5 Independent Temperature Control Loops with:
  • Maximum of 8 Possible setpoints per loop.
  • Programmable Alert/Alarm Deviation Limits.
  • SPIKE Control Mode with Programmable PID Coefficients.
  • PROFILE Control Mode also available.
• 16 Valve Outputs:
  • Designed to drive pneumatic solenoids directly (5 watt).
  • 24 VDC supplied with system – no external supply required.
• 8 Analog (MFC, Pressure Control, etc.) Loops.
  • Designed for direct interface to standard MFC’s.
  • 4 Setpoints per loop.
  • Programmable Alert/Alarm Deviation Limits.
• Step Redirect:
  • 8 Redirect Destinations available per recipe.
  • Each Redirect can be programmed based on any combination of 12 Digital Inputs, 6 or 10 temperature Alarms and 8 gas Alarms.
• Boat Loader Control:
  • 2 Digital Outputs for direction.
  • 2 Digital Inputs for limit switches.
  • Boat Speed output (0 – 10 volts)
  • Position input (0 – 10 volts)