Data Mining Systems for the Semiconductor Industry

PRODUCTS
SuperTMX™ - Bayview

	The SuperTMX™ Client's main form is termed Bayview. Bayview shows tool status information and is a launchpad for other SuperTMX™ Client applications. Bayview serves as SuperTMX™'s replacement for Thermco TMX's Stack Status.
Bayview & TMX Stack Status - Click Each to Enlarge

Bayview provides summary status information for each furnace stack (up to four tubes per stack), with the bank name and type (Thermco) as a header.

Within each stack, a rectangle represents one tube. Each rectangle shows:

• The name of the tube
• The current recipe name and step name
• The time remaining and expected Time Of Completion (TOC) of the current process
• The current data capture file name
• An icon that reflects the status of that tube at any given time:
  • Spinning wheel - Processing
  • Stationary wheel - Idle
  • Waiving checkered flag - Run Complete
  • Blinking red exclamation point - Run Aborted
  • Blue hand - Run Holding

In addition, the background color of each 'tool' shows whether the tube is Processing, Idle, or Offline. Also, if the background is blinking red, then there is one or more Event Alerts. Thus, at a glance from anywhere in the fab, in the office or around the world, interested personnel can determine the status of any tube in any bank.

Double-clicking within a 'tube' brings up Wingfx, which displays a graph of the current process on that tube. Right-clicking within a 'tube' brings up Process Manager, a Tube Detail page showing all the current parameters and setpoints for that tube and the current recipe.

Overview | Bayview | Process Manager | Recipe Manager |
Configuration Manger | Log Viewer | Event Viewer | File Navigator & Wingfx | Security Manager