Data Mining Systems for the Semiconductor Industry

PRODUCTS
SuperTMX™ - Configuration Manager

	Configuration Manager provides user-friendly table editing for the following tables: Stack Characteristics Table Gas Control Table Recipe Limits Table Event Names Table FCA Coefficients Table Furnace and Boat Table MFC Corrections Table Furnace Profile Values Table Profile TC Calibrations Table Variable Recipe Parameters
Configuration Manager serves as SuperTMX™'s replacement for Thermco TMX's Configuration Menu. Configuration Manager (Stack Characteristics Table) & TMX Configuration Menu - Click Each to Enlarge

With Configurations Manager's Windows interface, you can open several tables at once and arrange them within the parent widow so you can work on multiple tables at once.

Configuration Manager (Multiple Tables) - Click to Enlarge

The Configuration Manager also allows you to send (download) configurations to each tube.

Configuration Manager (Gas Control Table)- Click to Enlarge

Overview | Bayview | Process Manager | Recipe Manager |
Configuration Manger | Log Viewer | Event Viewer | File Navigator & Wingfx | Security Manager