Data Mining Systems for the Semiconductor Industry

PRODUCTS
SuperTMX™ - Event Viewer

	Event Viewer provides archived access to events, alarms, and Logstats for all processes.
Event Viewer - Click to Enlarge

With Event Viewer, you can search for events based on any or all of the following criteria:

• Tool
• Date range
• Event/Alarm name
• Recipe name
• Tool State

Once you have executed your search, you can sort the resulting data by any of the above listed fields, as well as several other fields.

Overview | Bayview | Process Manager | Recipe Manager |
Configuration Manger | Log Viewer | Event Viewer | File Navigator & Wingfx | Security Manager