Data Mining Systems for the Semiconductor Industry

PRODUCTS
SuperTMX™ - File Navigator & Wingfx

	File Navigator and Wingfx work together allowing the user to view Trace Data graphs of current and prior processes.
File Navigator & Wingfx - Click Each to Enlarge

File Navigator organizes and displays process data file information so that users can easily locate and view desired process runs. Most information is stored in a Windows tree format, organized by tool, bay/stack, and date/time. Users select a file to view and then launch a program for viewing graphs, alarm reports, or equipment specific reports. The File Navigator provides a common interface to start these different programs that display or analyze process file contents.

The WinGFX window shows data in plotted form or as raw numbers. Each pane includes a graph and legend complete with parameter title and a color-coded signal list. The colors of the signal names correspond to the line colors in the graph. Users can toggle on or off individual lines in a graph pane or an entire parameter plot. The Options menu at the top of the window offers many helpful features for manipulating the data display format and searching for specific criteria.

Overview | Bayview | Process Manager | Recipe Manager |
Configuration Manger | Log Viewer | Event Viewer | File Navigator & Wingfx | Security Manager