Data Mining Systems for the Semiconductor Industry

PRODUCTS
SuperTMX™ - Log Viewer

	Log Viewer maintains the Alarm and Logstat output of the SuperTMX™ in an easy to use, paperless form. Log Viewer, running on the SuperTMX™ System, replaces the printer from the Thermco TMX MUX.
Log Viewer - Click to Enlarge

As each Event arrives, the program displays it and stores it, sorted by Year, Stack, Tool, Date and Time, on the SuperTMX™ Server's hard disk. All the Alarms and Logstats are saved in a database and are easily accessed to be viewed at any time.

The Traditional Way… Thermco Furnaces offer a MUX Recipe command, ‘LOGSTAT’, to generate text output to a printer, or to the MUX’s disk for later printing. MUX programmers place this command at critical locations where reports are needed of furnace activity. When the command executes, the report is printed or stored.

Overview | Bayview | Process Manager | Recipe Manager |
Configuration Manger | Log Viewer | Event Viewer | File Navigator & Wingfx | Security Manager