Data Mining Systems for the Semiconductor Industry

PRODUCTS
SuperTMX™ - Overview

SuperTMX™ consists of two main components: The Server module and the Client applications. The Server module handles all low-level serial communication with the Thermco TMX Tube Computer. The Client applications provide all the important user functions: Tube Status, Recipe Download, Run Start, View Trace Data, etc.

Server Low-level communication with Tube Controllers, etc.

Client High-level communication with people.

Thermco TMX Tube & MUX Stack

One SuperTMX™ Server module can provide low-level communication with up to four Thermco TMX Tube Computers arranged in a single stack.

The Client applications can run on the same local PC along with the Supervisor giving users local access to all Controller functions.

The Client applications can also run on any networked PC, giving users remote access to all Controller functions.

Finally, the Client applications can run on an Internet Server giving users worldwide remote access to all Controller functions.

Large SuperTMX™ System Example - Click to Enlarge

Here is an overview of a system with multiple furnace stacks, showing the positions of local SuperTMX™ Servers in the fab near the equipment, and remote Clients outside the fab. Client applications can access all tubes from any stack. This is true for Client apps running on local PCs along with Server modules and for Client apps running alone on remote PCs.

Overview | Bayview | Process Manager | Recipe Manager |
Configuration Manger | Log Viewer | Event Viewer | File Navigator & Wingfx | Security Manager