Data Mining Systems for the Semiconductor Industry

PRODUCTS
SuperTMX™ - Process Manager

	Process Manager provides detailed tube status information, replacing the old Thermco TMX Tube Status screens. It also provides a way to download, start and abort recipes, download new tube configurations, and view alarms. Process Manager serves as SuperTMX™'s replacement for Thermco TMX's Tube Status.
Process Manager & TMX Tube Status - Click Each to Enlarge

Process Manager's User Interface is divided into four areas:

• Tool Status
  • Stack Information
  • Tool Information
  • Recipe Information
  • State/Alarm Information
• Gases
  • MFC
  • Meter
  • Valve Status Information
• Temperatures/Boat
• Main Furnace Temperature
• Source Furnace Temperature
• Load Station
• N2 Purge Information
• Events
  • Name and Number of each TMX Event

Any variable that is causing an Event to be on (Alarming) is highlighted in red, making it easy to recognize potential problems at a glance.

The following functions can be performed on the tube remotely via Process Manager:

• Start Recipe
• Standby
• Abort Recipe
• Send Recipe
• Send Configuration

Overview | Bayview | Process Manager | Recipe Manager |
Configuration Manger | Log Viewer | Event Viewer | File Navigator & Wingfx | Security Manager